Expert: Paul Soderman - 1/23/2009

Question
Hello. I am an undergraduate majoring in the engineering field. Recently, I stumbled upon a problem while doing my lab work. I tried researching on the web but to no avail, therefore I would like to seek your expertise on it. This experiment is dealing with dry etching. The question I would like to ask is that what are some metals that do not actually react with the chemical CF4 beside gold? Your reply would be greatly appreciated, thanks for volunteering to help here.

Regards
Jason

Answer
Jason
I'm no chemist, but my brother-in-law is.  He offers the following answer which or may not be helpful.

The chemical is stable, but incompatible with zinc, alkaline earth metals, Group I metals, aluminum and its alloys. Non-flammable. It is stored under pressure, probably in steel cylinders. Student should do a Google search on "carbon tetrafluoride" without the quotes.

Paul